Electron Microscope Analyzers

QUANTAX Micro-XRF

痕量元素灵敏度,样品制备最少

高速元素X射线映射甚至在大区域

膜厚度分析

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Destaques

10 ppm
detection limit
由于较低的光谱背景,启用痕量元素分析
4 mm/s
旅行速度
可选的快速阶段可以在大区域上进行高速映射
1 nm - 40 µm
层厚度范围
可以分析从1 nm到多层结构的薄膜,可以分析40 µm的薄膜

Micro-XRF as a Complimentary Analytical Technique to EDS Analysis in the SEM

  • Micro-X-ray Fluorescence (Micro- XRF) spectroscopy analysis is a complementary non-destructive analytical technique to traditional Energy Dispersive Spectroscopy (EDS) analysis using a Scanning Electron Microscope (SEM). Such analyses are important for the characterization of the elemental composition within unknown samples ranging from large centimeter sized inhomogeneous specimens down to small micrometer particles.
  • X-ray excitation yields a much higher sensitivity for trace element detection (down to as low as10 ppm对于某些元素),扩展的X射线光谱范围(up to 40 keV), as well as information from greater depth within the sample.
  • 配备了X射线管与微焦X射线光学元件结合使用,可产生小尺寸30 µmwith high intensity throughput.
  • A modular piezo-based stage, specially designed to mount on top of the existing SEM stage enables high-speed elemental X-ray mapping “on the fly” over large areas up to a speed of4 mm/ sec。这使得可以在50 x 50 mm(或更高)的样本量中获取X射线映射数据,并在快速且用户友好的情况下包含光元素光谱数据以及跟踪元素和/或更高的能量X射线数据工作流程。
  • X射线激发的较大深度允许从头开始表征多层系统1 nm,最多40 µm,电子激发是不可能的。

Benefícios

通过Micro-XRF和快速阶段扩展您的SEM分析功能

  • 双光束电势,无论是电子束还是X射线束,为材料表征提供了新的可能性 - 同时研究样品。
  • Using the same detector for simultaneous e-beam/ micro-XRF acquisition, incorporating light element spectral data as well as trace element and/ or higher energy X-ray data.
  • Xtrace和快速阶段无缝集成在ESPRIT software
  • Combined EDS and micro-XRF quantification results in a more complete sample characterization by combining the better light element sensitivity of electron excitation with the better trace element sensitivity of XRF.
  • 与微XRF和电子束激发同时映射,结合了两者的优势。使用Micro-XRF的电子束和较重的元素激发光元素(碳含量)。
  • 单独的峰和扩展光谱范围使能力能够看到高能K线,因为它们不那么复杂且重叠较低。
  • 最低样品准备 - 无导电样品表面,无需大量抛光
  • Standardless and standard-based quantification.

aplicações

即使在低浓度水平下以µm尺度的低浓度水平结合轻元素

来自智利的El Tesoro矿的异国铜样品。

Large Area Mapping of Mineralogical Samples

The new Rapid Stage is specifically designed for SEMs to enable large area mapping over millimeter (mm) to centimeter (cm) scales. This will eliminate potential SEM X-ray intensity variation artifacts associated with low magnification mapping and thus enhance elemental and mineralogical information in a timeous manor that was previously not possible.
外来CU沉积样品的大面积图。

Elemental and Mineral distribution in Exotic-Cu Deposits

观察样品中元素变化的能力对于理解地质过程和矿石沉积物很重要。在SEM上包含Micro-XRF的双源系统可在大面积上启用元素X射线映射,该区域显示了PPM量表上的主要,次要且还可以跟踪元素。
Sample from Karangahake gold mine in New Zealand.

探索和采矿的双源应用:含有Au的表现样品

The combination of micro-XRF with SEM enables the potential to analyze samples at multiple scales, from centimeters (cm) to millimeters (mm) to micrometers (µm) and below within a solitary system. Thus, by adding the micro-XRF to an SEM you convert your SEM to a dual source system, meaning that there are 2 excitations sources, the e-beam and photon beam. Either source can be used individually, or simultaneously, to generate sample X-rays that will be measured using the same EDS detector.
大面积的钻石叶绿石。

地幔岩学和钻石的来源

提出了一种地图地幔garne SEM-XRF元素t-spinel peridotite from the diamond-bearing Newlands kimberlite (South Africa, Kaapvaal Craton). The intensity of the various elements indicates certain minerals that are present in the sample.
土壤样品的大面积地图。

鉴定土壤中污染物和毒素

使用SEM-XRF可以对具有地形的样品进行大面积映射(超图)。也就是说,需要最少的样品制备,可以直接分析样品而不会降低任何降低。这在对土壤的分析中尤其重要,在这种分析中,任何形式的样品制备(例如安装,抛光或碳涂层)都可能改变样品。
CIGS结构

用SEM Micro-XRF进行薄膜分析

As X-rays may pass through matter, X-ray Fluorescence (XRF) allows the determination of layer thickness. Using micro-XRF on SEM, the layer analysis (thickness and composition) is rendered feasible with spatial resolution at the micrometer scale. Layer analysis is strongly based on quantification using atomic fundamental parameter (FP).

Acessórios

快速阶段

The Rapid Stage can be mounted on top of the SEM stage for fast mapping over large sample areas.