Micro-XRF as a Complimentary Analytical Technique to EDS Analysis in the SEM
Micro-X-ray Fluorescence (Micro- XRF) spectroscopy analysis is a complementary non-destructive analytical technique to traditional Energy Dispersive Spectroscopy (EDS) analysis using a Scanning Electron Microscope (SEM). Such analyses are important for the characterization of the elemental composition within unknown samples ranging from large centimeter sized inhomogeneous specimens down to small micrometer particles.
X-ray excitation yields a much higher sensitivity for trace element detection (down to as low as10 ppm对于某些元素),扩展的X射线光谱范围(up to 40 keV), as well as information from greater depth within the sample.
配备了X射线管与微焦X射线光学元件结合使用,可产生小尺寸30 µmwith high intensity throughput.
A modular piezo-based stage, specially designed to mount on top of the existing SEM stage enables high-speed elemental X-ray mapping “on the fly” over large areas up to a speed of4 mm/ sec。这使得可以在50 x 50 mm(或更高)的样本量中获取X射线映射数据,并在快速且用户友好的情况下包含光元素光谱数据以及跟踪元素和/或更高的能量X射线数据工作流程。
Using the same detector for simultaneous e-beam/ micro-XRF acquisition, incorporating light element spectral data as well as trace element and/ or higher energy X-ray data.
Combined EDS and micro-XRF quantification results in a more complete sample characterization by combining the better light element sensitivity of electron excitation with the better trace element sensitivity of XRF.