洞察力WLI
ハイライト
Insight WLI与300mm晶圆处理程序
The fully automated InSight WLI system offers unmatched optical surface measurement capabilities with wafer-handler integration. Designed from the ground up for the most demanding R&D, quality assurance, and process quality control needs, the InSight WLI incorporates Bruker's patented tip/tilt head, a proprietary self-calibrating laser reference, integrated pattern recognition, and a host of other Bruker-exclusive interferometry innovations. No other metrology system provides the non-contact accuracy, throughput, and operator convenience for such a vast range of production metrology and imaging applications.
特长
Benchmark for Accuracy and Robustness
- 独特的计量传感器设计，具有专利双来的光源
- Self-calibrating, metrology optimizing laser reference
- 我ntegrated vibration-isolation floor-mount cabinet
测量和分析
Fastest, Easiest Nanometer-Scale Measurements
- 完整的汽车mated measurement capabilities
- 行业领先的纳米尺度功能
Most Powerful Measurement and Analysis
- 流线型，可自定义的生产界面
- Flexible recipe and automation measurement optimization
- Extensive library of filters and customizable analysis options
Configurations for Demanding Requirements
Configurations for Demanding Advanced Packaging
- 完整的模具平坦度和CMP计量解决方案
- TSV和互连测量
- Hot-spot and defect detection on full reticle die
准备好工厂自动化
- SECS/GEM
- S2/S8 Compliant
- FDC, DCOL available
アプリケーション
Read More About WLI Metrology In Use
-
Characterization of CMP Processes with White Light Interferometry(PDF, 4 MB)该申请说明描述了白光干涉法（WLI）为各种CMP组件提供的测量和分析优势。它还详细介绍了一项改进研究，该研究调查了CMP过程中晶圆下流体层的垂体行为，并揭示了抛光和调节对垫子的影响以及晶圆抛光效果。
-
Performing Comprehensive Wafer Inspection with Non-Contact 3D Optical Profiling(PDF, 3 MB)本申请说明讨论了3D光学分析如何提供比其他测量技术的许多优势，用于非接触式检查半导体包装前端过程研究和控制。这些优势从全自动测量和非破坏性检查到自定义分析和快速测量速度。
-
Advantages of Measuring Surface Roughness with White Light Interferometry(PDF, 3 MB)This application note discusses the use of mean roughness measurements with white light interferometry (WLI) optical profilers. Spatial filters are explained, as well as some of the normative standards requirements from ASME B46.1-2009, ISO 13565-1 and JIS B 0671-1.3 Main technical reasons for WLI selection are covered as well as the advantages and areas of applicability of the full areal measurement standard from ISO 25178-2.
サポート
Support
How Can We Help?
布鲁克partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.
Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.