Inline Metrology
Preferred Choice of Leading Foundries and Memory Makers
InSight AFP is the world’s highest performance and industry preferred CMP profiling and etch depth metrology system for advanced technology nodes. The combination of itsmodern tip scannerwith inherently stable capacitive gauges and an accurate air-bearing positioning system enables non-destructive, direct measurements in the active area of dies.
Insight AFP的Truesense®技术,具有原子力学师的经过验证的长扫描能力。可以在不依赖测试键或型号的情况下,以无与伦比的可重复性进行完全自动化的亚微米特征上的蚀刻深度,盘旋和侵蚀。这是独一无二的
The Insight AFP combines the latest innovations in atomic force microscopy, including Bruker’s proprietary CDMode characterizing sidewall features and roughness. CDmode reduces the amount of required cross-sectioning, realizing significant cost savings. In addtion, AFP data provides a direct side-wall roughness measurement that cannot be obtained through other techniques.
The device killing defects of today's leading ICs are smaller than ever and require rapid resolution for HVM demands. The InSight AFP provides fast, actionable topographical and material information about defects on semiconductor wafers and phtomasks that allows manufacturers to rapidly identify sources of defectivity and eliminate their impact on production.
100倍的高分辨率注册光学元件和AFM全局对齐对图案化的晶片和掩模可实现小于±250 nm的原始图像放置精度,以确保感兴趣的缺陷是测量的缺陷。
The system is fully compatible with KLARITY and most other YMS systems.
Profiling speeds up to 36,000 µm/sec enables rapid, full 3D post-CMP characterization and inspection for full 33 mm x 26 mm flash fields and larger. Sub 2 nm out-of-plane motion for true large-scale topography and fully automated post polish hot spot detection.
在此示例中,以1微米x 1微米像素的大小在24小时内获得了完整的标准,26 mm x 33 mm的标线视场扫描。然后,可以使用Bruker的热点检测并审查功能自动检测并恢复热点。
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