Stylus Profilometer

Dektak XTL

Gage-capable QA/QC profiler for optimal 300mm performance
Dektak XTL

Основные моменты

Dektak XTL

The Dektak XTLStylus缩影仪可容纳最大350mm x 350mm的样品,带来传奇的Dektak®repeatability and reproducibility to large-format wafer and panel manufacturing. The Dektak XTL features pneumatic vibration isolation and a fully enclosed workstation with easily accessible interlocking door, making it ideal for today’s demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation maximizes manufacturing throughput.

Robust
自动化设置和操作
Programs fiducials and unlimited measurement sites to maximize throughput and minimize errors.
Dual
camera control
简化测量设置和导航到兴趣点的速度。
简单的
analysis and data collection
Automates analysis routines and reports only desired features on complex samples.

Особенности

Features

行业的最佳自动化和分析软件

增强的软件功能使Dektak XTL成为最强大,最容易使用的手写笔伪造者。该系统利用Vision64软件,可以使用数百个内置分析工具启用无限测量站点,3D映射和高度定制的表征。Vision MicroForm软件还测量形状,例如曲率半径。模式识别可最大程度地减少操作员的错误,并增强测量位置的精度。多合一的软件包将数据收集和分析与直观的工作流相结合。

Vision64 Production Interface.

无与伦比的手写笔技术

Operator loading 300mm wafer onto Dektak XTL.

The Dektak XTL builds upon over 50 years of stylus expertise and application customization for production facilities to meet the stringent industry roadmaps of both today and tomorrow. The 300-millimeter, high-accuracy encoded XY staging gives manufacturers a reliable tool to meet stringent gage R&R requirements. Dektak’s Dual Camera Control with high-magnification dual view cameras offers enhanced spatial awareness. Point-and-click positioning in the live video allows operators to quickly place samples at the right location for quick and easy measurement setup and automation programming. The system’s large interlocked door provides safe and easy access for sample loading/unloading.

Other hardware features include:

  • Single-arch architecture and integrated vibration isolation for industry-leading performance
  • Quick-change self-aligning stylus
  • High-accuracy encoded XY stage for faster automated data collection
  • N-Lite low force with Soft Touch technology and 1mm measurement range can be used simultaneously to measure delicate and high-vertical range samples

Вебинары

Дополнительная информация

Специалист

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