Dektak XTL
Highlights
Dektak XTL
The Dektak XTL™stylus profilometer accommodates samples up to 350mm x 350mm, bringing legendary Dektak®对大型晶圆和面板制造的可重复性和可重复性。Dektak XTL具有气动振动隔离和一个完全封闭的工作站，具有易于访问的互锁门，使其非常适合当今苛刻的生产地板环境。它的双相机体系结构可增强空间意识，并且其高水平的自动化水平可最大程度地提高制造吞吐量。
Features
Industry's Best Automation and Analysis Software
Enhanced software features make the Dektak XTL the most powerful, easiest to use stylus profiler available. The system utilizes Vision64 software that enables unlimited measurement sites, 3D mapping, and highly customized characterization with hundreds of built-in analysis tools. Vision Microform software also measures shapes, such as radius of curvature. Pattern recognition minimizes operator error and enhances measurement location accuracy. The all-in-one software package combines data collection and analysis with an intuitive workflow.
Unmatched Stylus Technology
Dektak XTL建立在50多年的手写笔专业知识和生产设施的应用程序定制基础上，以满足当今和明天的严格行业路线图。300毫米级编码的XY登台为制造商提供了可靠的工具，可满足严格的量规R＆R要求。Dektak具有高磁化双视图摄像机的双摄像头控件提供了增强的空间意识。实时视频中的点击定位允许操作员快速将样品放在正确的位置，以快速，易于测量设置和自动化编程。该系统的大型互锁门为样品加载/卸载提供了安全易于使用。
Other hardware features include:
- 单轴结构和集成振动隔离，用于行业领先的性能
- Quick-change self-aligning stylus
- High-accuracy encoded XY stage for faster automated data collection
- N-Lite low force with Soft Touch technology and 1mm measurement range can be used simultaneously to measure delicate and high-vertical range samples