维FastScan Pro

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The Dimension FastScan Pro delivers the highest metrology-level speed and performance of any industrial AFM available today. The system enables automated or semi-automated measurements while ensuring the utmost ease of use and the lowest cost per measurement for quality control, quality assurance, and failure analysis.

Proprietary

AFM production technology

Enables industry-leading surface characterization.

Unrivalled

service and support

Lowers costs through operational efficiencies.

Automated

AFM scanner

Provides reliable, seamless measurement workflow.

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특징

Features

Production Versatility

FastScan Pro utilizes an open-access platform, large- or multiple-sample holders, and numerous ease-of-use features to provide flexible high-performance nanoscale metrology for industrial QA, QC, and FA applications. The system delivers automated 2-inch to 12-inch wafer measurements for semi, data storage and HB-LED. It features increased XY sample travel for full access to 200mm wafers or multiple samples in 200-mm diameter area, with optional chucks for 300-mm wafers. The system also provides the choice between a high-throughput 5-10x FastScan scanner for topography, roughness and other metrology analyses, or an Icon scanner with 90µm scan range for larger scans and high-accuracy topography performance.

Powerful Automation Software

AutoMET™ full-recipe software delivers fast, automated metrology, simple operation, and AFM adaptability for easy capture of critical-to-quality measurements needed in production. This software allows automated measurements on multiple samples or a single large sample for nanoscale characterization across multiple locations. It also provides optical and AFM image pattern recognition, tip-centering, full wafer or grid mapping support, and image-placement accuracy within tens of nanometers. Comprehensive, yet simple, recipe writing gives real-time and offline use for the advanced users.

Easy measurement recipe creation allows engineers to define location by name, assign any type, and number measurements at each location.

Recipe window showing wafer-based layout for precise, user-defined X-Y measurement locations within a wafer.

Precise Probe-Sample Control

The Dimension FastScan Pro provides the most precise probe-sample control permits widest range of sample types, from soft polymers, thin films and electrical samples to very hard materials.

Unique technology enables pinpoint force to any atom on your sample. This precise probe-to-sample control permits the widest range of sample types, from soft polymers, thin films, and electrical samples to hard materials. It also provides the lowest available imaging forces and long probe tip life over hundreds of engages and data scans.

응용

Applications

维FastScan Pro Data Gallery

Trenches are difficult to image with typical imaging modes due to excessive damping of the probe oscillation. ScanAsyst easily reaches the bottom of trenches. In this example, trenches with a depth of ~65 nm and a width of ~50 nm are routinely measured with standard Bruker probes.

Semi-automated 24/7 operations using a Dimension AFM to characterize 3D geometry for process control.

Extremely flat glass substrate with low roughness values of Rq=0.194nm, Ra=0.153nm.

An alkali-aluminosilicate sheet glass main property is characterized by its strength and scratch resistance, making it challenging to measure its nanometer topography consistently and reliably. Using FastScan AFM and a single Bruker HPI probe, a first image (A) rendered roughness Rq=0.99 nm, Ra=0.79. Image no. 615 (B) rendered the same roughness; Rq=0.99 nm, Ra=0.79. Insets are digitally zoomed images of scan no. 1 and no. 615 revealing insignificant topographical changes.

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