FastScan Pro
Highlights
Dimension FastScan Pro
尺寸FastScan Pro提供了当今可用的任何工业AFM的最高计量级速度和性能。bob娱乐平台该系统可以实现自动化或半自动测量值，同时确保最大的使用易用性以及每次测量的最低成本，以进行质量控制，质量保证和故障分析。
Eigenschaften
生产多功能性
FastScan Proutilizes an open-access platform, large- or multiple-sample holders, and numerous ease-of-use features to provide flexible high-performance nanoscale metrology for industrial QA, QC, and FA applications. The system delivers automated 2-inch to 12-inch wafer measurements for semi, data storage and HB-LED. It features increased XY sample travel for full access to 200mm wafers or multiple samples in 200-mm diameter area, with optional chucks for 300-mm wafers. The system also provides the choice between a high-throughput 5-10x FastScan scanner for topography, roughness and other metrology analyses, or an Icon scanner with 90µm scan range for larger scans and high-accuracy topography performance.
强大的自动化软件
AutoMET™ full-recipe software delivers fast, automated metrology, simple operation, and AFM adaptability for easy capture of critical-to-quality measurements needed in production. This software allows automated measurements on multiple samples or a single large sample for nanoscale characterization across multiple locations. It also provides optical and AFM image pattern recognition, tip-centering, full wafer or grid mapping support, and image-placement accuracy within tens of nanometers. Comprehensive, yet simple, recipe writing gives real-time and offline use for the advanced users.
精确的探针样本控制
独特的技术使您可以在样品上的任何原子上进行精确的力。这种精确的探针到样品控制允许样品类型的最广泛范围，从软聚合物，薄膜和电样品到硬材料。bob综合游戏它还提供了数百次参与和数据扫描的最低现象成像力和长期探测寿命。
安温登根
尺寸FastScan Pro数据库
