尺寸边缘PSS
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尺寸边缘PSS
Bruker的Dimension Edge™PSS原子力显微镜带有自动™计量软件是用于LED底物和外延制造商的理想纳米量学和纳米启示系统。作为尺寸边缘AFM平台的扩展，Edge PSS结合了尺寸AFM系统闻名的令人难以置信的价值和分辨率，同时还为基材测量提供了基于生产的解决方案。
Características
PSS分析的最高分辨率
As the pitch of patterned sapphire substrate (PSS) goes below 2 microns, traditional confocal techniques lose the resolution needed to provide valuable process metrology. The Dimension Edge PSS atomic force microscope (AFM) solves this need with sub-nanometer resolution and the ability to measure up to nine 2-inch wafers at a time (or a single 4- or 6-inch wafer), providing all the data necessary to keep the PSS manufacturing process under control.
除了尺寸边缘PSS内置的特定PSS测量功能外，该系统还纳入了尺寸显微镜已闻名的所有世界领先的Bruker AFM技术，包括高分辨率和低噪声，用于外观上的粗糙度测量以及此类噪音。标准和专有的AFM模式为TAPPESTMODE，接触模式，Apaimimaging™和LiftMode™。
Advanced PSS Metrology Capabilities
- 高度，宽度和音高
- Side wall angle & feature profile
- Asymmetry identification & measurement
- 污染识别
- 转向标识和转弯角
- Flat top identification
行业领先的AutoMET软件
The Edge PSS incorporates AutoMET software that is specifically designed to meet LED manufacturing requirements. The software features two distinct modes of operation:
- Operator Level – A simple user interface with push button guides users through the steps of tip change, align, tune and qualify. Single button operation runs up to 9 wafers automatically with simple PASS/FAIL output.
- Engineer Level – A password protected user interface allows engineers to access all critical AFM parameters. Process engineers can also set all necessary pass/fail criteria easily with in this mode.
