复合半导体的X射线计量学

QCVELOX-E

Optimum HRXRD performance for epilayer monitoring

System of choice for leading epi manufacturers

The essential tool for routine analysis of semiconductor substrates, epilayer structures and processed device wafers.

JV-QCVelox

Основные моменты

QCVELOX-E

Bruker Qcvelox-E是领先的EPI制造商监视其生产线的首选系统。它基于行业标准QC3,其吞吐量,可靠性和易用性进行了重大升级。通过使用最佳的X射线源和光学技术,它可以将高通量与出色的可重复性相结合,从而可以在生产环境中快速反馈层质量和结构。

最佳X射线
source and optics technology
真正的自动化操作
for routine analysis of semiconductor substrates, epilayer structures and processed device wafers

Особенности

特征

Automated Operation

The QCVelox-E offers true automated operation, with straight-forward horizontal sample mounting, and fully automated alignment, measurements including full mapping without edge exclusion, and automated data analysis. An integrated barcode reader is fitted to aid productivity within a production environment.
可选的机器人处理程序可用于盒式磁带的自动加载和测量,以及SECS-GEM和其他工厂主机系统的选项。

QCVELOX-E是用于所有复合半导体材料的半导体底物,表层结构和加工设备晶片的常规分析的必要工具。bob综合游戏

Поддержка

支持

How Can We Help?

Bruker与我们的客户合作解决了现实世界中的应用程序问题。我们开发下一代技术,并帮助客户选择正确的系统和配件。在工具出售工具很久之后,这种合作伙伴关系继续通过培训和扩展服务。bob电竞官方网站

Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.

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